专利摘要:
A thermochemical treatment plant (100) comprises a reaction chamber (140), at least one gas inlet (104), a gas preheating chamber (110) located between the gas inlet (104) and the gas chamber (104). reaction (140). The preheating chamber (110) comprises a plurality of perforated distribution trays (111-114) spaced apart one above the other. The preheating chamber (110) further comprises, between at least the distribution trays facing each other, a plurality of walls (1110, 1120, 1130) defining between said trays (111-114) circulation paths for a gas flow.
公开号:FR3018526A1
申请号:FR1452151
申请日:2014-03-14
公开日:2015-09-18
发明作者:Bernard Delperier;Jean-Francois Potin;Sophie Soulignac
申请人:Herakles SA;
IPC主号:
专利说明:

[0001] BACKGROUND OF THE INVENTION The invention relates to installations or furnaces used for carrying out heat treatments and in which the gas or gases used in the treatments are preheated before being introduced into the treatment chamber of the installation. Such installations are used in particular for carrying out thermochemical treatments such as carburizing parts or densifying porous substrates by chemical vapor infiltration. A field of application of the invention is that of the production of parts made of thermostructural composite material, that is to say composite material having both mechanical properties that make it suitable for constituting structural parts and the capacity to keep these properties up to high temperatures. Typical examples of thermostructural composite materials are carbon / carbon (C / C) composites having a carbon fiber reinforcement texture densified by a pyrolytic carbon matrix and ceramic matrix composites (CMC) having a fiber reinforcing texture. refractories (carbon or ceramic) densified by a ceramic matrix. A well-known process for densifying porous substrates for making C / C composite or CMC parts is chemical vapor infiltration (CVI). The substrates to be densified are placed in a loading zone of an installation where they are heated. A reactive gas containing one or more gaseous precursors of the material constituting the matrix is introduced into the furnace. The temperature and the pressure in the installation are adjusted to allow the reactive gas to diffuse within the porosity of the substrates and to form a deposit of the material constituting the matrix by decomposition of one or more constituents of the reactive gas or reaction between several constituents, these constituents forming the precursor of the matrix. The process is carried out under reduced pressure in order to promote the diffusion of the reactive gases into the substrates. The transformation temperature of the precursor (s) to form the material of the matrix, such as pyrolytic or ceramic carbon, is in most cases between 900 ° C. and 1100 ° C., this temperature possibly being as high as 2000 ° C. in the case a massive deposit of pyrolytic carbon by chemical vapor deposition (CVD) In order to achieve the densest possible densification of substrates throughout the loading zone, whether in terms of density increase or in terms of microstructure of the matrix material formed, it is necessary that the reactive gas enters the loading zone with a minimum and homogeneous temperature.
[0002] Also, the installations usually comprise means for preheating the gas. These preheating means may be located at the periphery of the installation, that is to say on the path of the gas before entering the treatment chamber of the installation. Such preheating means increase the complexity and bulk of the installation. In order to avoid these drawbacks, it is known to provide the installation with a zone or chamber for preheating reactive gas located between the inlet of the reactive gas in the installation and the loading zone. Typically, the preheating zone comprises a plurality of perforated trays traversed by the reactive gas. The gas preheating trays, as well as the substrates are heated due to their presence in the installation. The heating of the installation is generally provided by induction or by electrical means such as resistors housed in the wall of the installation. However, if the preheating chamber makes it possible to heat the reactive gas before it is introduced into the loading zone, it is difficult to radially control the homogeneity of the temperature of the reactive gas in the preheating chamber, in particular in large installations. diameter. In order to solve this problem, it could be envisaged to increase the efficiency of the preheating of the gas by enlarging the preheating zone, notably by increasing its volume in height but at the expense of that of the total volume loading area of the installation. equal. However, treatments such as chemical vapor infiltration processes require expensive investments on an industrial scale, and are very time consuming. It is therefore highly desirable that the installations have a high productivity, whether in-service installations or new installations to be carried out, thus a ratio as high as possible between the useful volume dedicated to the loading of the substrates or parts to be treated and the volume dedicated to heating the reactive gas. OBJECT AND SUMMARY OF THE INVENTION The object of the invention is to propose a thermochemical treatment plant design which makes it possible to preheat a gaseous flow at a determined temperature while minimizing the temperature differences between the center and the periphery of the installation at the outlet of the preheating chamber, without having to increase its volume so as to favor the productivity of the installation.
[0003] For this purpose, the present invention provides a thermochemical treatment plant comprising a reaction chamber, at least one gas inlet, a gas preheating chamber located between the gas inlet and the reaction chamber, said preheating chamber comprising a plurality of perforated distribution trays held spaced one above the other, characterized in that the preheating chamber further comprises, between at least two distribution trays facing each other, a plurality of walls defining between said trays of traffic paths for a gas flow.
[0004] By using walls between the distribution trays, the heating capacity of the preheating chamber is increased by increasing the heat exchange by convection on the one hand, and on the other hand by lengthening the course and, consequently, , the residence time of the gas in the preheating chamber. It also improves the homogeneity of the temperature profile of the reactive gas at the outlet of the preheating chamber, and whatever the diameter of the installation. With the installation of the invention, it is possible to obtain equivalent or even better preheating performance with a preheating chamber having a volume smaller than that of a chamber without walls. Alternatively, at equal preheating chamber volume, one achieves much better heating and temperature homogeneity performances with a preheating chamber provided with walls according to the invention than with a preheating chamber not including such walls. According to a feature of the installation of the invention, the distribution trays have a disc shape and at least some walls extend between said trays in a radial direction. Such an arrangement makes it possible to guide the flow of the gas flow over the entire surface of the trays and to maximize heat transfer.
[0005] According to another characteristic of the installation of the invention, at least a portion of the walls has a corrugated shape, which makes it possible to extend the length of the walls and, consequently, the heat exchange surface for the gas flow. According to another characteristic of the installation of the invention, the walls have a greater thermal conductivity in a direction parallel to the distribution plates than in a direction perpendicular to said perforated plates. This makes it possible to define anisotropic thermal conduction between the distribution trays which creates a partial thermal decoupling between the cold part of the installation and the loading zone while increasing the heating capacity of the preheating chamber. In this case, the walls may be of composite material comprising a fiber reinforcement densified by a matrix, with the fibers of the reinforcement which are mainly oriented in a direction parallel to the distribution trays or graphite.
[0006] According to another characteristic of the installation of the invention, the number of walls is greater in the vicinity of the periphery of the distribution trays than in the center of said trays. This optimizes the distribution of the walls between the plates and further increases the heat exchange surface for the gas flow.
[0007] According to another characteristic of the installation of the invention, it comprises a loading plate present above the distribution trays of the preheating chamber, said loading platform being supported by columns passing through the distribution trays. There is thus a decoupling between the mechanical and thermal functions in the preheating chamber.
[0008] BRIEF DESCRIPTION OF THE DRAWINGS Other features and advantages of the densification furnace according to the invention will become apparent on reading the description given below, by way of indication but without limitation, with reference to the appended drawings in which: FIG. 1 is a schematic sectional view of a densification plant by chemical vapor infiltration according to an embodiment of the invention; FIG. 2 is an exploded perspective view showing the constituent elements of the preheating chamber of the installation of FIG. 1; - Figure 3 is a top view of a distribution plate of the preheating chamber of Figure 2; FIG. 4 is an exploded perspective view showing the constituent elements of a preheating chamber according to another embodiment of the invention; - Figure 5 is a top view of a distribution plate of the preheating chamber of Figure 4.
[0009] DETAILED DESCRIPTION OF EMBODIMENTS The invention applies to all types of installations or furnaces used to carry out heat treatments and in which the gas or gases used in the treatments are preheated in a preheating chamber before they are introduced into the zone. treatment or loading of the installation. Such installations are used in particular for carrying out thermochemical treatments such as carburizing parts or densifying porous substrates by chemical vapor infiltration.
[0010] A first embodiment of a densification furnace is described in relation with FIGS. 1 to 3. FIG. 1 schematically shows a densification installation by chemical vapor infiltration 100 delimited by a cylindrical lateral wall 101, a bottom wall. 102 and an upper wall 103.
[0011] A gas preheating chamber 110, whose structure will be described hereinafter in detail, extends between the bottom 102 of the furnace and a loading plate 120. A pipe 106 connects the reactive gas inlet (s) 104 to the preheating chamber 110, through the bottom 102. Substrates to be densified 130 are arranged in a loading zone or reaction chamber 140 in a plurality of annular vertical stacks 131 which rest on the loading platform 120. This comprises a plurality of passages 121 aligned with the internal volumes 130a of the stacks and each stack is closed at its upper part by a cover 132. The stacks 131 of substrates 130 rest on the loading tray 120 and can be divided into several superposed sections separated by one or more intermediate trays 122 having central passages 122a aligned with those of the substrates 130. Each substrate 130 is separated from an adjacent substrate or, where appropriate, a tray 120, 122 or cover 132 by spacers 133 which define intervals. The shims 133, or at least a portion of them, are arranged to provide passages for the gas between the volumes 130a and 141. These passages can be made to substantially balance the pressure between the volumes 130a and 141, as described in US Pat. No. 5,904,957, or so as to constitute simple leakage passages maintaining a pressure gradient between the volumes 130a and 141, as described in the patent application EP 0 063 988. A gas stream 150, containing a or more gaseous precursors of the material constituting the matrix, is admitted into the oven through the inlet 104 and then passes through the preheating chamber 110. The preheated gas phase is then conveyed through the passages 121 of the loading tray 120 in the internal volumes. 130a of the batteries 131. The gas then passes into the volume 38 external to the cells inside the reaction chamber 140. The effluent gas is extracted through a passage 105 formed in the upper wall 103, the passage 105 being connected by a line 107 to suction means, such as a vacuum pump (not shown). According to an alternative embodiment, the internal volumes 130a can be closed at their lower part and placed in communication at its upper part with the passage 105. The gas flow from the preheating chamber 110 is then admitted in the volume 141 of the reaction chamber 140 and the circulation of the gas in this zone is from the volume 141 to the volumes 130a, the volume 141 being closed at its upper part. According to yet another variant, the inlet of the gas flow can be made through the upper wall 103 of the installation, the preheating chamber then being located at the upper part of the installation, the volumes 130a being in communication with the preheating chamber and closed at their lower part while the volume 141 communicates with a gas outlet formed in the bottom wall of the furnace, or vice versa.
[0012] In the example described here, the heating of the installation is performed by induction. More specifically, the cylindrical side wall 101 constitutes an armature, or susceptor, for example graphite, which is coupled with an inductor 108 located outside the oven and formed of at least one induction coil. An insulator 109 is interposed between the inductor 108 and the wall 101. In a well known manner, the heating of the furnace is ensured by the heating of the armature 101 when the inductor 108 is supplied with an alternating voltage. For this purpose, the coil or coils of the inductor are connected to an alternating voltage generator (not shown). The magnetic field created by the inductor 108 induces in the wall 101 (susceptor) an electric current which Joule causes the heating of the latter, the elements present inside the wall 101 being heated by radiation. The heating of the installation 100 may be provided by other means such as electric heating means consisting for example of heating resistors embedded in the wall 101. The preheating chamber 110 comprises several distribution trays, here four trays 111 , 112, 113 and 114 (Figure 2). Each distribution plate 111, 112, 113 and 114 respectively comprises a plurality of perforations 111a, 112a, 113a and 114a through which the gas flow 150 will flow during its preheating (Figure 1). According to the invention, walls or baffles are arranged in the spaces between the distribution trays. In the embodiment described here: - walls 1110 are arranged between the distribution trays 111 and 112, - walls 1120 are arranged between the distribution trays 112 and 113, - walls 1130 are arranged between the distribution trays 113 and 114.
[0013] Furthermore, still in the embodiment described here, walls 1140 are also arranged between the distribution plate 114 and the loading platform 120. According to alternative embodiments of the invention, walls or baffles can be interposed between only a limited number of distribution plates, or even only between two distribution trays. In the embodiment shown here, the walls 1110, 1120, 1130 and 1140 have a planar shape and extend vertically between the distribution trays. The distribution trays 112, 113 and 114 respectively rest on the walls 1110, 1120 and 1130. The distribution plate 111 is supported by spacers 1400 which extend between the bottom 102 of the installation 100 and the lower surface of the 111. The loading platform 120, supporting all the piles 131, is supported by columns 1410 resting on the bottom 102 of the installation 100. The columns 1410 pass through the distribution trays via openings 111b 112b, 113b and 114b respectively formed in the distribution trays 111, 112, 113 and 114. The mechanical and thermal functions are thus separated at the preheating chamber, the mechanical support function of the loading being ensured by the columns. 1410 while the thermal function is provided by the distribution trays 111, 112, 113 and 114 and the walls 1110, 1120, 1130 and 1140. The perforations 111a, 112a, 113a and 114a present Respectively in the distribution trays 111, 112, 113 and 114 are preferably positioned at different locations between two adjacent trays so as to lengthen the flow path of the gas phase between the distribution trays. In FIG. 2, the perforations 111a and 113a are positioned in the vicinity of the periphery 35 of the trays 111 and 113 while the perforations 112a of the plate 112 interposed between the trays 111 and 113 are positioned in the vicinity of the center of the tray 112. The tray 114 which is the last plate of the preheating chamber has perforations 114a on its entire surface. As illustrated in Figure 3, the walls 1120 are disposed on the plate 112 in a substantially radial direction. This radial arrangement, which is also that of the walls 1110, 1130 and 1140, is used to heat and guide the gas flow 150 opening into the space between two distribution trays. In FIG. 3, the walls 1120 make it possible to guide and heat the gaseous flow emerging between the distribution trays 112 and 113 through the perforations 112a of the plate 112. The walls 1110, 1120, 1130 and 1140 thus define respectively between the trays 111, 112, 113, 114 and 120 of the circulation paths for the gas phase. The walls 1110, 1120, 1130 and 1140 being of a material able to heat up under the effect of the thermal radiation of the wall 101 of the installation 100, they make it possible to significantly increase the heating capacity of the preheating chamber by transferring convective heat to the gas phase and optimizing the flow of said gas phase into the preheating chamber.
[0014] Furthermore, the walls have preferences of smaller dimensions than the radius of the distribution trays so as to occupy optimally the space between the distribution trays. In FIG. 3, the walls 1120 are arranged radially in three series, namely a first series 1120a as close as possible to the center of the plate 112, a second series 1120b at an intermediate portion of the plate 112 and a third series 1120c in the This arrangement is also that of the walls 1110, 1130 and 1140. This radial arrangement in several series makes it possible to have a larger number of walls as one moves away from the center of the plateau. and thus optimize the heat exchange surface formed by the walls. In addition, this radial arrangement in series of the walls makes it possible to have discontinuities in the flow paths of the gas stream which optimizes its flow. The walls used in the preheating chamber of the invention are made of materials having a good ability to transfer heat by convection such as graphite or a refractory metal such as stainless steel or molybdenum. The walls are further preferably made of a material which has a thermal conductivity in a direction parallel to the distribution trays which is greater than the conductivity in a direction perpendicular to said perforated trays. Indeed, with such materials, anisotropic thermal conduction is defined between the distribution trays which allows a partial thermal decoupling between the cold part of the installation (bottom wall or upper wall of the installation depending on the position of the the preheating chamber) and the loading zone while increasing the heating capacity of the preheating chamber. Such materials may in particular be graphite or a thermostructural composite material comprising a fiber reinforcement densified by a matrix with the fibers of the reinforcement mainly oriented in a direction parallel to the distribution trays. Figure 4 shows a preheating chamber 210 which differs from the preheating chamber 110 already described in that it uses corrugated walls. The preheating chamber 210 integrates into the chemical infiltration densification plant 100 in the same manner as the preheating chamber 110 already described. For the sake of simplification, the elements of the installation 100 already described will not be described again. The preheating chamber 210 comprises a plurality of distribution trays, here four trays 211, 212, 213 and 214 each respectively comprising a plurality of perforations 211a, 212a, 213a and 214a through which the gas phase will circulate during its preheating. According to the invention, walls or baffles are arranged in the spaces between the distribution trays. In the embodiment described here: - walls 2110 are arranged between the distribution trays 211 and 212, - walls 2120 are disposed between the distribution trays 212 and 213, - walls 1130 are disposed between the distribution trays 213 and 214.
[0015] Furthermore, still in the embodiment described here, walls 2140 are also arranged between the distribution plate 214 and the loading platform 220. According to alternative embodiments of the invention, walls or baffles can be interposed between only a limited number of distribution trays, or even only between two distribution trays. In the embodiment shown here, the walls 2110, 2120, 2130 and 2140 have a wavy shape and extend vertically between the distribution trays. This corrugated shape of the walls makes it possible to lengthen the length of the walls in comparison with walls of flat shape such as the walls 1110, 1120, 1130 and 1140 described above and to increase, therefore, the heat exchange surface with the gas phase. during its passage in the preheating chamber 210.
[0016] The distribution trays 212, 213 and 214 respectively rest on the walls 2110, 2120 and 2130. The distribution tray 211 is supported by the spacers 1400 which extend between the bottom 102 of the installation 100 and the lower surface of the tray 111. The loading platform 120, supporting all the cells 131, is supported by columns 1410 resting on the bottom 102 of the installation 100. The columns 1410 pass through the distribution trays via openings 211b, 212b , 213b and 214b formed respectively in the distribution trays 211, 212, 213 and 214. The mechanical and thermal functions are thus separated at the preheating chamber, the mechanical support function of the loading being ensured by the columns 1410 while the thermal function is ensured by the distribution trays 211, 212, 213 and 214 and the walls 2110, 2120, 2130 and 2140. The perforations 211a, 212a, 213a and 214a present respectively Effectively in the distribution trays 211, 212, 213 and 214 are preferably positioned at different locations between two adjacent trays so as to lengthen the flow path of the gas phase between the distribution trays. In FIG. 4, the perforations 211a, 212a, 213a and 214a are respectively positioned in the same manner as the perforations 111a, 112a, 113a and 114a already described.
[0017] As illustrated in Figure 5, the walls 2130 are disposed on the plate 213 in a substantially radial direction. This radial arrangement, which is also that of the walls 2110, 2120 and 2140, allows to heat and guide the gas flow opening into the space between two distribution trays. In FIG. 5, the walls 2130 make it possible to guide and heat the gaseous flow emerging between the distribution trays 213 and 214 by the perforations 213a of the tray 213. The walls preferably have dimensions smaller than the radius of the distribution trays so as to to optimally occupy the space between the distribution trays. In FIG. 5, the walls 2130 are arranged radially in three series, namely a first series 2110a as close as possible to the center of the plate 213, a second series 2130b at an intermediate portion of the plate 213 and a third series 2130c in the adjacent to the periphery of the plate 213. This radial arrangement in several series makes it possible to have a larger number of walls as one moves away from the center of the plate and thus to optimize the heat exchange surface constituted by the walls. In addition, this radial arrangement in series of the walls makes it possible to have discontinuities in the circulation paths of the gaseous phase which optimizes its flow. The walls used in the preheating chamber of the invention are made of materials having a good ability to transfer heat by convection such as graphite or a refractory metal such as stainless steel or molybdenum. The walls are further preferably made of a material which has a higher thermal conductivity in a direction parallel to the distribution trays than in a direction perpendicular to said perforated trays. Indeed, with such materials, anisotropic thermal conduction is defined between the distribution trays which allows a partial thermal decoupling between the cold part of the installation (bottom wall or upper wall of the installation depending on the position of the the preheating chamber) and the loading zone while increasing the heating capacity of the preheating chamber. Such materials may in particular be graphite or a thermostructural composite material comprising a fiber reinforcement densified by a matrix with the fibers of the reinforcement mainly oriented in a direction parallel to the distribution trays. As a comparative example in a densification plant by chemical vapor infiltration, it has been possible to reduce the height of the preheating chamber by 30% by using a preheating zone according to the invention, that is, that is to say a preheating zone comprising walls between the trays defining circulation paths for the gas stream, and with performances equal to or even greater in terms of the capacity and homogeneity of the heating of the gas stream than that of the chamber of preheating according to the prior art, that is to say not having such walls between the trays. This decrease in height of the preheating chamber by virtue of the invention is as much height returned to the useful area of the installation, namely the treatment chamber whose loading capacity is thus increased.
权利要求:
Claims (10)
[0001]
REVENDICATIONS1. A thermochemical treatment plant (100) comprising a reaction chamber (140), at least one gas inlet (104), a gas preheating chamber (110) located between the gas inlet (104) and the reaction chamber (140), said preheating chamber (110) comprising a plurality of perforated distribution trays (111-114) spaced apart from one another, characterized in that the preheating chamber (110) further comprises between at least two distribution trays vis-à-vis, a plurality of walls (1110, 1120, 1130, 1140) defining between said trays (111-114) circulation paths for a gas flow.
[0002]
2. Installation according to claim 1, characterized in that the distribution trays (111-114) have a disc shape and in that at least some walls (1110, 1120, 1130, 1140) extend between said trays in a radial direction.
[0003]
3. Installation according to claim 1 or 2, characterized in that at least a portion of the walls (2110, 2120, 2130, 2140) has a corrugated shape.
[0004]
4. Installation according to any one of claims 1 to 3, characterized in that the walls (1110, 1120, 1130, 1140) have a higher thermal conductivity in a direction parallel to the distribution plates (111-114) than in a direction perpendicular to said perforated trays.
[0005]
5. Installation according to claim 4, characterized in that the walls (1110, 1120, 1130, 1140) are of composite material comprising a fiber reinforcement densified by a matrix and in that the fibers of the reinforcement are mainly oriented in one direction. parallel to the distribution trays (111-114). 35
[0006]
6. Installation according to claim 4, characterized in that the walls (1110, 1120, 1130, 1140) are made of graphite.
[0007]
7. Installation according to any one of claims 2 to 6, characterized in that the number of walls (1110, 1120, 1130, 1140) is greater in the vicinity of the periphery of the plates (111-114) distribution that in the center of said trays.
[0008]
8. Installation according to any one of claims 1 to 7, characterized in that it comprises a loading tray (120) present above the distribution trays (1110, 1120, 1130, 1140) of the preheating chamber (110), said loading tray being supported by columns (1410) passing through the distribution trays.
[0009]
9. Installation according to claim 8, characterized in that the support plate (120) comprises a plurality of circular openings (121) each for cooperating with a stack (131) of annular fiber preforms (130) to be densified.
[0010]
10. Installation according to any one of claims 1 to 9, characterized in that it comprises a susceptor comprising at least one side wall (101) surrounding the preheating chamber (110) and the reaction chamber (140) and an inductor (108) capable of heating the side wall by induction.
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法律状态:
2016-03-02| PLFP| Fee payment|Year of fee payment: 3 |
2017-02-10| PLFP| Fee payment|Year of fee payment: 4 |
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优先权:
申请号 | 申请日 | 专利标题
FR1452151A|FR3018526B1|2014-03-14|2014-03-14|CVI DENSIFICATION INSTALLATION INCLUDING A HIGH-CAPACITY PREHEATING ZONE|FR1452151A| FR3018526B1|2014-03-14|2014-03-14|CVI DENSIFICATION INSTALLATION INCLUDING A HIGH-CAPACITY PREHEATING ZONE|
CN201580013881.3A| CN106133189B|2014-03-14|2015-03-05|CVI densification device including high capacity pre-heater area|
PCT/FR2015/050546| WO2015136193A1|2014-03-14|2015-03-05|Cvi densification equipment including a high-capability preheating area|
EP15713984.1A| EP3117020B1|2014-03-14|2015-03-05|Cvi densification equipment including a high-capability preheating area|
RU2016140396A| RU2682902C2|2014-03-14|2015-03-05|Cvi densification equipment including high-capability preheating area|
JP2016574498A| JP6526070B2|2014-03-14|2015-03-05|CVI densification system including high volume preheating zone|
KR1020167028069A| KR20160132927A|2014-03-14|2015-03-05|Cvi densification equipment including a high-capability preheating area|
US15/125,854| US9845534B2|2014-03-14|2015-03-05|CVI densification installation including a high capacity preheating zone|
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